Title: Method and apparatus for manufacturing image displaying apparatus
Abstract: A method and an apparatus for manufacturing an image displaying apparatus having a display panel. A first substrate of the display panel on which a phosphor exciter is disposed and a second substrate of the display panel on which phosphors emitting light by the phosphor exciter is provided, are prepared under a vacuum atmosphere. Then, the first and the second substrates are carried in a getter processing chamber or bake processing chamber, and getter processing or bake processing is applied thereto under the vacuum atmosphere. After the processing, the first and the second substrates are carried in a seal processing chamber, where the substrates are heat sealed under the vacuum atmosphere. Thus, reduction of vacuum exhaust time and a high vacuum degree in manufacturing an image displaying apparatus is attained and efficiency of manufacturing is improved.
Patent Number: 6,905,384 Issued on 06/14/2005 to Miyazaki, et al.
| Inventors:
|
Miyazaki; Toshihiko (Isehara, JP);
Nakata; Kohei (Machida, JP);
Kaneko; Tetsuya (Yokohama, JP)
|
| Assignee:
|
Canon Kabushiki Kaisha (Tokyo, JP)
|
| Appl. No.:
|
781305 |
| Filed:
|
February 13, 2001 |
Foreign Application Priority Data
| Feb 16, 2000[JP] | 2000-038603 |
| Current U.S. Class: |
445/25; 445/24; 445/38 |
| Intern'l Class: |
H01J 009/00 |
| Field of Search: |
445/5,6,24,25,38,40-42,59,66,70
|
References Cited [Referenced By]
U.S. Patent Documents
| 4607593 | Aug., 1986 | Van Hemel.
| |
| 5066883 | Nov., 1991 | Yoshioka et al.
| |
| 5433639 | Jul., 1995 | Zahuta et al.
| |
| 5564958 | Oct., 1996 | Itoh et al.
| |
| 5605483 | Feb., 1997 | Takeda et al.
| |
| 5653838 | Aug., 1997 | Hwang et al.
| |
| 5697825 | Dec., 1997 | Dynka et al.
| |
| 5749763 | May., 1998 | Yoshioka et al.
| |
| 5827102 | Oct., 1998 | Watkins et al.
| |
| 5876260 | Mar., 1999 | Pepi et al.
| |
| 6004181 | Dec., 1999 | Robinson.
| |
| 6049168 | Apr., 2000 | Iosue et al.
| |
| 6254449 | Jul., 2001 | Nakanishi et al.
| |
| 6479944 | Nov., 2002 | Lee et al.
| |
| 6702636 | Mar., 2004 | Nakata et al.
| |
| 6821174 | Nov., 2004 | Nakata et al.
| |
| 2002/0039870 | Apr., 2002 | Kaneko et al.
| |
| Foreign Patent Documents |
| 0 782 169 | Jul., 1997 | EP.
| |
| 1 168 410 | Jan., 2002 | EP.
| |
| 2 705 163 | Nov., 1994 | FR.
| |
| 61071533 | Apr., 1986 | JP.
| |
| 7-262929 | Oct., 1995 | JP.
| |
| 11-135018 | May., 1999 | JP.
| |
| 1999-0053755 | Jul., 1999 | KR.
| |
| WO 96/3885/5 | Dec., 1996 | WO.
| |
| WO 99/1732/9 | Apr., 1999 | WO.
| |
Other References
W.P. Dyke et al., "Field Emission", Advances in Electronics and Electron Physics,
vol. VIII, 1956, pp. 89-185.
H. Araki, et al., "Electroforming and Electron Emission of Carbon Thin Films",
Journal of th Vacuum Soc. of Japan, vol. 2-6, No. 1, 1983, pp. 22-29 (with English
Abstract on p. 22).
G. Dittmer, "Electrical Conduction and Electron Emission of Discontinuous Thin
Films", Thin Solid Films, 9, 1972 pp. 317-328.
M. Elinson, et al. "The Emission of Hot Electrons and the Field Emissions of
Electrons From Tin Oxide", Radio Engineering and Electronic Physics, Jul. 1965,
pp. 1290-1298.
C.A. Mead, "Operation of Tunnel-Emission Devices," J. Applied Physics, vol. 32,
No. 4, Apr. 1961, pp. 646-652.
C.A. Spindt et al., "Physical Properties of Thin Films of Thin-film Field Emission
Cathodes with Molybdenum Cases," J. Applied Physics, vol. 47, No. 12, Dec. 1976,
pp. 5248-5263.
M. Hartwell et al., "Strong Electron Emission From Patterned Tin-Indium Oxide
Films", IEDM, 1975, pp. 519-521.
|
Primary Examiner: Williams; Joseph
Assistant Examiner: Dong; Dalei
Attorney, Agent or Firm: Fitzpatrick, Cella, Harper & Scinto
Claims
1. A method of manufacturing an image displaying apparatus, comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by said phosphor exciting
means is disposed under the vacuum atmosphere;
b: carrying said second substrate or both of said first and second substrates
into a getter processing chamber in the vacuum atmosphere under the vacuum atmosphere,
and subjecting to getter processing by flashing an evaporation type getter to a
surface of said second substrate at which the phosphors are disposed, thereby forming
a getter film on the surface of said second substrate at which the phosphors are
disposed; and
c: carrying said first and second substrates into a seal processing chamber in
the vacuum atmosphere under the vacuum atmosphere, and heat sealing said substrates
in an opposing state,
wherein each processing chamber is evacuated into 10
-4 Pa or more
lower pressure.
2. A method of manufacturing an image displaying apparatus according to claim
1, wherein said steps a, b and c are steps set on one line.
3. A method of manufacturing an image displaying apparatus according to claim
1, wherein said steps a, b and c are steps set on one line, and a heat shielding
member is disposed between said getter processing chamber and said seal processing chamber.
4. A method of manufacturing an image displaying apparatus according to claim
3, wherein said heat shielding member is formed of reflective metal.
5. A method of manufacturing an image displaying apparatus according to claim
1, wherein said steps a, b and c are steps set on one line, and a load lock is
disposed between said getter processing chamber and said seal processing chamber.
6. A method of manufacturing an image displaying apparatus according to claim
1, wherein said steps a, b and c are steps set on a star arrangement.
7. A method of manufacturing an image displaying apparatus according to claim
1, wherein said steps a, b and c are steps set on a star arrangement, and said
getter processing chamber and said seal processing chamber are partitioned by an
independent chamber.
8. A method of manufacturing an image displaying apparatus according to claim
1, wherein said phosphor exciting means has electron beam emitting means.
9. A method of manufacturing an image displaying apparatus according to claim
1, wherein said first substrate has an envelope fixedly disposed around said first
substrate in advance.
10. A method of manufacturing an image displaying apparatus according to claim
1, wherein said first substrate has a spacer fixedly disposed inside said first
substrate in advance.
11. A method of manufacturing an image displaying apparatus according to claim
1, wherein said first substrate has an envelope fixedly disposed around said first
substrate and a spacer fixedly disposed inside said first substrate.
12. A method of manufacturing an image displaying apparatus according to claim
1, wherein said second substrate has an envelope fixedly disposed around said second
substrate in advance.
13. A method of manufacturing an image displaying apparatus according to claim
1, wherein said second substrate has a spacer fixedly disposed inside said second
substrate in advance.
14. A method of manufacturing an image displaying apparatus according to claim
1, wherein said second substrate has an envelope fixedly disposed around said second
substrate and a spacer fixedly disposed inside said first substrate.
15. A method of manufacturing an image displaying apparatus according to claim
1, wherein said evaporation type getter is a barium getter.
16. A method of manufacturing an image displaying apparatus according to claim
1, wherein a sealing material used in said step c is a low melting point material.
17. A method of manufacturing an image displaying apparatus according to claim
16, wherein said low melting point material is a low melting point metal or an
alloy of such a metal.
18. A method of manufacturing an image displaying apparatus according to claim
17, wherein said low melting point metal is indium or an alloy of indium.
19. A method of manufacturing an image displaying apparatus according to claim
16, wherein said low melting point material is frit glass.
20. A method of manufacturing an image displaying apparatus, comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by said phosphor exciting
means is provided under the vacuum atmosphere;
b: carrying said first and second substrates into a bake processing chamber in
the vacuum atmosphere under the vacuum atmosphere and subjecting to bake processing
both said substrates at predetermined temperature;
c: carrying said second substrate or both of said first and second substrates
into a getter processing chamber in the vacuum atmosphere under the vacuum atmosphere,
and subjecting to getter processing by flashing an evaporation type getter to a
surface of said second substrate at which the phosphors are disposed, thereby forming
a getter film on the surface of said second substrate at which the phosphors are
disposed; and
d: carrying said first and second substrates into a seal processing chamber in
the vacuum atmosphere under the vacuum atmosphere, and heat sealing said substrates
in an opposing state,
wherein each processing chamber is evacuated into 10
-4 Pa or more
lower pressure.
21. A method of manufacturing an image displaying apparatus according to claim
20, wherein said steps a, b, c and d are steps set on one line.
22. A method of manufacturing an image displaying apparatus according to claim
20, wherein said steps a, b, c and d are steps set on one line, and a heat shielding
member is disposed between said bake processing chamber and said getter processing
chamber, between said bake processing chamber and said seal processing chamber,
or between said bake processing chamber, said getter processing chamber and said
seal processing chamber, respectively.
23. A method of manufacturing an image displaying apparatus according to claim
22, wherein said heat shielding member is formed of a reflective metal.
24. A method of manufacturing an image displaying apparatus according to claim
20, wherein said steps a, b, c and d are steps set on one line, and a load lock
is disposed between said bake processing chamber and said getter processing chamber,
between said bake processing chamber and said seal processing chamber, or between
said bake processing chamber, said getter processing chamber and said seal processing
chamber, respectively.
25. A method of manufacturing an image displaying apparatus according to claim
20, wherein said steps a, b, c and d are steps set on a star arrangement.
26. A method of manufacturing an image displaying apparatus according to claim
20, wherein the steps a, b, c and d are arranged on a star arrangement, and said
bake processing chamber and said getter processing chamber, said getter processing
chamber and said seal processing chamber, or said bake processing chamber and said
seal processing chamber, are partitioned by an independent chamber.
27. A method of manufacturing an image displaying apparatus according to claim
20, wherein said phosphor exciting means has electron beam emitting means.
28. A method of manufacturing an image displaying apparatus according to claim
20, wherein said first substrate has an envelope fixedly disposed around said first
substrate in advance.
29. A method of manufacturing an image displaying apparatus according to claim
20, wherein said first substrate has a spacer fixedly disposed inside said first
substrate in advance.
30. A method of manufacturing an image displaying apparatus according to claim
20, wherein said first substrate has an envelope fixedly disposed around said first
substrate and a spacer fixedly disposed inside said first substrate.
31. A method of manufacturing an image displaying apparatus according to claim
20, wherein said second substrate has an envelope fixedly disposed around said
second substrate in advance.
32. A method of manufacturing an image displaying apparatus according to claim
20, wherein said second substrate has a spacer fixedly disposed inside said second
substrate in advance.
33. A method of manufacturing an image displaying apparatus according to claim
20, wherein said second substrate has an envelope fixedly disposed around said
second substrate and a spacer fixedly disposed inside said first substrate.
34. A method of manufacturing an image displaying apparatus according to claim
20, wherein said evaporation type getter is a barium getter.
35. A method of manufacturing an image displaying apparatus according to claim
20, wherein a sealing material used in the step c is a low melting point material.
36. A method of manufacturing an image displaying apparatus according to claim
35, wherein said low melting point material is a low melting point metal or an
alloy of such a metal.
37. A method of manufacturing an image displaying apparatus according to claim
36, wherein said low melting point met al is indium or an alloy of indium.
38. A method of manufacturing an image displaying apparatus according to claim
35, wherein said low melting point material is frit glass.
39. A method of manufacturing an image displaying apparatus, comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by said phosphor exciting
means is disposed under the vacuum atmosphere;
b: carrying said first and second substrates into a bake processing chamber in
the vacuum atmosphere under the vacuum atmosphere and subjecting to bake processing
both said substrates at predetermined temperature;
c: carrying one or both of said first and second substrates into a first getter
processing chamber in the vacuum atmosphere under the vacuum atmosphere, and subjecting
to first getter processing said one substrate carried or one or both of said substrates
carried;
d: carrying one or both of said first and second substrates into an electron
beam clean processing chamber in the vacuum atmosphere under the vacuum atmosphere,
and subjecting to electron beam clean processing said one substrate carried or
one or both of said substrates carried;
e: carrying said second substrate or both of said first and second substrates
into a second getter processing chamber in the vacuum atmosphere under the vacuum
atmosphere, and subjecting to second getter processing by flashing an evaporation
type getter to a surface of said second substrate at which the phosphors are disposed,
thereby forming a getter film on the surface of said second substrate at which
the phosphors are disposed; and
f: carrying said first and second substrates into a seal processing chamber in
the vacuum atmosphere under the vacuum atmosphere, and heat sealing said substrates
in an opposing state,
wherein each processing chamber is evacuated into 10
-4 Pa or more
lower pressure.
40. A method of manufacturing an image displaying apparatus according to claim
39, wherein said steps a, b, c, d, e and f are steps set on one line.
41. A method of manufacturing an image displaying apparatus according to claim
39, wherein said steps a, b, c, d, e and f are steps set on one line, and a heat
shielding member is disposed between said bake processing chamber and said first
getter processing chamber, between said first getter processing chamber and said
electron beam clean processing chamber, between said electron beam clean processing
chamber and said second getter processing chamber, or between said second getter
processing chamber and said seal processing chamber.
42. A method of manufacturing an image displaying apparatus according to claim
41, wherein said heat shielding member is formed of a reflective metal.
43. A method of manufacturing an image displaying apparatus according to claim
39, wherein the steps a, b, c, d, e and f are steps set on one line, and a load
lock is disposed between said bake processing chamber and said first getter processing
chamber, between said first getter processing chamber and said electron beam clean
processing chamber, between said electron beam clean processing chamber and said
second getter processing chamber, or between said second getter processing chamber
and said seal processing chamber.
44. A method of manufacturing an image displaying apparatus according to claim
39, wherein the steps a, b, c, d, e and f are set on a star arrangement.
45. A method of manufacturing an image displaying apparatus according to claim
39, wherein the steps a, b, c, d, e and f are set on a star arrangement, and said
bake processing chamber, said first getter processing chamber, said electron beam
clean processing chamber, said second getter processing chamber and said seal processing
chamber are partitioned by independent chambers.
46. A method of manufacturing an image displaying apparatus according to claim
39, wherein said phosphor exciting means has electron beam emitting means.
47. A method of manufacturing an image displaying apparatus according to claim
39, wherein said first substrate has an envelope fixedly disposed around said first
substrate in advance.
48. A method of manufacturing an image displaying apparatus according to claim
39, wherein said first substrate has a spacer fixedly disposed inside said first
substrate in advance.
49. A method of manufacturing an image displaying apparatus according to claim
39, wherein said first substrate has an envelope fixedly disposed around said first
substrate and a spacer fixedly disposed inside said first substrate.
50. A method of manufacturing an image displaying apparatus according to claim
39, wherein said second substrate has an envelope fixedly disposed around said
second substrate in advance.
51. A method of manufacturing an image displaying apparatus according to claim
39, wherein said second substrate has a spacer fixedly disposed inside said second
substrate in advance.
52. A method of manufacturing an image displaying apparatus according to claim
39, wherein said second substrate has an envelope fixedly disposed around said
second substrate and a spacer fixedly disposed inside said first substrate.
53. A method of manufacturing an image displaying apparatus according to claim
39, wherein said getter used in the step b is an evaporation type getter.
54. A method of manufacturing an image displaying apparatus according to claim
53, wherein said evaporation type getter is a barium getter.
55. A method of manufacturing an image displaying apparatus according to claim
39, wherein a sealing material used in the step f is a low melting point material.
56. A method of manufacturing an image displaying apparatus according to claim
55, wherein said low melting point material is a low melting point metal or an
alloy of such a metal.
57. A method of manufacturing an image displaying apparatus according to claim
56, wherein said low melting point metal is indium or an alloy of indium.
58. A method of manufacturing an image displaying apparatus according to claim
55, wherein said low melting point material is frit glass.
59. A method of manufacturing an image displaying apparatus, comprising the steps of:
a: a preparing a first substrate on which phosphor exciting means is disposed
and a second substrate on which phosphors emitting light by said phosphor exciting
means is disposed under a vacuum a atmosphere;
b: carrying under a vacuum atmosphere said first and second substrates into a
bake processing chamber of which atmosphere is evacuated to subject both of said
first and second substrates to a bake processing at a predetermined temperature;
c: carrying under a vacuum atmosphere one or both of said first and second substrates
into a cleaning processing chamber of which atmosphere is evacuated, to subject
one or both of the substrates carried therein to a cleaning processing;
d: carrying under the vacuum atmosphere said second substrate or both of said
first and second substrates into a second getter processing chamber, and subjecting
the substrate or substrates carried therein to a second getter processing by flashing
an evaporation type getter to a surface of said second substrate on which the phosphor
is disposed, thereby forming a getter film on the surface of said second substrate
on which the phosphor is disposed; and
e: carrying under the vacuum atmosphere said first and second substrates into
a sealing processing chamber of which atmosphere is evacuated, and heat sealing
said first and second substrates in an opposing state,
wherein each processing chamber is evacuated into 10
-4 Pa or more
lower pressure.
60. A method of manufacturing an image displaying apparatus according to claim
59, wherein said cleaning processing includes a process of an electron beam irradiation
onto the one substrate carried therein or one or both of the substrates carried therein.
61. A method of manufacturing an image displaying apparatus according to claim
59, wherein said cleaning processing includes an electron beam irradiation onto
the surface of said second substrate on which the phosphor is disposed.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an image displaying apparatus in which electron-emitting
devices are arranged in matrix, more particularly to a method and an apparatus
for manufacturing an image displaying apparatus having a display panel on which
a rear plate (RP) provided with electron-emitting devices arranged in matrix and
a face plate (FP) provided with phosphors are arranged in opposing positions as
a first image forming member and as a second image forming member, respectively.
2. Related Background Art
Conventionally, an electron-emitting device is roughly divided into
two known types, i.e., a thermal electron-emitting device and a cold-cathode electron-emitting
device. The cold-cathode electron-emitting device includes the field emission type
(hereinafter referred to as the FE type), the metal/insulation layer/metal type
(hereinafter referred to the MIM type), the surface conducting type electron-emission
device, and the like.
As an example of the FE type, an electron-emission device disclosed in W. P.
Dyke
& W. W. Dolan, "Field Emission", Advance in Electron Physics, 8, 89 (1956), C.
A. spindt, "PHYSICAL Properties of thin-film field emission cathodes with molybdenum
cones", J. Appl. Phys., 47, 5248 (1976), or the like is known.
As an example of the MIM type, an electron-emission device disclosed in C. A.
Mead, "Operation of Tunnel-Emission Devices", J. Appl. Phys., 32, 646 (1961) or
the like is known.
As an example of the surface conducting type electron-emission device type, an
electron-emission device disclosed in M. I. Elinson, Radio Eng. Electron Phys.,
10, 1290 (1965) or the like is known.
A surface conducting type electron-emission device is to utilize a phenomenon
that
generates electron emission by flowing electric current to a thin film with a small
area formed on a substrate in parallel with the surface of the film. As the surface
conducting type electron-emission device, one using an SnO
2 thin film
by Elinson, et al. mentioned above, one using an Au thin film [G. Dittmer: "Thin
Solid Films," 9, 317 (1972)], one using an In
2O
3/SnO
2
thin film [M. Hartwell and C. G. Fonstad: "IEEE Trans. ED Conf.", 519 (1975)],
one using a carbon thin film [Araki Hisashi, et al.: Shinku, Vol. 26, No. 1, page
22 (1983)] and the like are known.
For the manufacture of an image displaying apparatus using the above-mentioned
electron-emitting device, a process for manufacturing a display panel is used which
comprises the steps of: preparing an electron source substrate on which such electron-emitting
devices are arranged in matrix as an RP and preparing a phosphor substrate to be
an FP provided with phosphors that emit light due to excitation by an electron
beam; disposing the FP and the RP in opposing positions by disposing a spacer providing
an envelope and an anti-atmospheric pressure structure such that the electron-emitting
elements and the phosphors will be inside and; sealing the inside using a low-melting
point material such as frit glass, indium or the like as a sealing material; and
sealing off a vacuum exhaust pipe provided in advance after vacuum exhausting the
inside from the vacuum exhaust pipe.
The manufacturing method according to the conventional art described above requires
considerably long time for manufacturing one display panel, thus is not suitable
for manufacturing a display panel inside of which requires the vacuum degree of
1×10
-6 Pa or more.
The drawback of this conventional art was solved by a method described, for example,
in the Japanese Patent Application Laid-open No. 11-135018.
In the method described in the Japanese Patent Application Laid-open No. 11-135018,
since only a step of sealing two substrates after positioning an FP and an RP in
a single vacuum chamber is used, the above-mentioned other steps such as bake processing,
getter processing, electron beam clean processing and the like that are necessary
for preparing a display panel needs to be applied in the single vacuum chamber
respectively. In addition, since movements of the FP and the RP between vacuum
chambers are performed upon loosing evacuated state into non-vacuum state, each
vacuum chamber is evacuated every time when an FP and an RP are carried therein.
Due to these reasons, manufacturing process time is long. Therefore, considerable
reduction of manufacturing process time has been required, and at the same time,
it has been required to attain high vacuum degree of 1×10
-6 Pa
or more in a display panel during a final manufacturing step in a short time.
SUMMARY OF THE INVENTION
It is an object of the present invention to enable to easily attain reduction
of vacuum exhaust time and high vacuum degree in manufacturing an image displaying
apparatus, thereby improving efficiency of manufacturing.
According to one aspect of the present invention, a method of manufacturing
an image displaying apparatus comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by the phosphor exciting means
under the vacuum atmosphere;
b: carrying one or both of the first and the second substrates into a getter
processing
chamber in the vacuum atmosphere under the vacuum atmosphere, and subjecting to
getter processing the one substrate carried or one or both of the substrates carried; and
c: carrying the first and the second substrates in a seal processing chamber
in
the vacuum atmosphere under the vacuum atmosphere, and heat sealing the substrates
in an opposing state is provided.
According to another aspect of the present invention, a method of manufacturing
an image displaying apparatus comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by the phosphor exciting means
under the vacuum atmosphere;
b: carrying the first and the second substrates into a bake processing chamber
in the vacuum atmosphere under the vacuum atmosphere and subjecting to bake processing
both the substrates at predetermined temperature; and
c: carrying the first and the second substrates in a seal processing chamber
in
the vacuum atmosphere under the vacuum atmosphere, and heat sealing the substrates
in an opposing state is provided.
According to a still another aspect of the present invention, an apparatus
for manufacturing an image displaying apparatus comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first vacuum chamber in which one or both of the first and the second substrates
can be carried under the vacuum atmosphere by the conveying means;
c: getter giving means, arranged in the first vacuum chamber, having a getter
precursor and getter activating means for activating the getter precursor;
d: a second vacuum chamber in which the first and the second substrates can be
carried in under the vacuum atmosphere by the conveying means;
e: substrate arranging means, arranged in the second vacuum chamber toward inside,
for arranging the first and the second substrates in positions opposite to each
other by orienting the first and the second members for an image displaying apparatus
toward inside; and
f: sealing means, arranged in the second vacuum chamber, for heat sealing the
first and the second substrates arranged in opposing positions by the substrate
arranging means at predetermined temperature is provided.
According to a further aspect of the present invention, an apparatus for
manufacturing an image displaying apparatus comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
c: baking means, arranged in the first vacuum chamber, for bake processing the
carried first and the second substrates by heating the first and second substrates and;
d: a second vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
e: substrate arranging means, arranged in the second vacuum chamber, for arranging
the first and the second substrates in positions opposite to each other by orienting
the first and the second members for an image displaying apparatus toward inside; and
f: sealing means, arranged in the second vacuum chamber, for heat sealing the
first and the second substrates arranged in opposing positions by the substrate
arranging means at predetermined temperature is provided.
BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1A, 1B and 1C are schematic cross-sectional views of an
apparatus according to a one example of the present invention;
FIG. 2 is a schematic plan view of an apparatus according to an another example
of the present invention; and
FIG. 3 is a cross-sectional view of an image displaying apparatus that is manufactured
according to an apparatus and a method of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
First, the present invention is a method of manufacturing an image displaying
apparatus, which is characterized by comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by the phosphor exciting means
under the vacuum atmosphere;
b: carrying one or both of the first and the second substrates into a getter
processing
chamber in the vacuum atmosphere under the vacuum atmosphere, and subjecting to
getter processing the one substrate carried or one or both of the substrates carried; and
c: carrying the first and the second substrates in a seal processing chamber
in
the vacuum atmosphere under the vacuum atmosphere, and heat sealing the substrates
in an opposing state.
Secondly, the present invention is a method of manufacturing an image displaying
apparatus, which is characterized by comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by the phosphor exciting means
under the vacuum atmosphere;
b: carrying the first and the second substrates into a bake processing chamber
in the vacuum atmosphere under the vacuum atmosphere and subjecting to bake processing
both the substrates at predetermined temperature; and
c: carrying the first and the second substrates in a seal processing chamber
in
the vacuum atmosphere under the vacuum atmosphere, and heat sealing the substrates
in an opposing state.
Thirdly, the present invention is a method of manufacturing an image displaying
apparatus, which is characterized by comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by the phosphor exciting means
under the vacuum atmosphere;
b: carrying the first and the second substrates into a bake processing chamber
in the vacuum atmosphere under the vacuum atmosphere, and subjecting to bake processing
both the substrates at predetermined temperature;
c: carrying one or both of the first and the second substrates into a getter
processing
chamber in the vacuum atmosphere under the vacuum atmosphere, and getter processing
the carried one substrate or one or both of the carried substrates; and
d: carrying the first and the second substrates in a seal processing chamber
in
the vacuum atmosphere under the vacuum atmosphere, and heat sealing the substrates
in an opposing state.
Fourthly, the present invention is a method of manufacturing an image displaying
apparatus, which is characterized by comprising the steps of:
a: preparing a first substrate on which phosphor exciting means is disposed and
a second substrate on which phosphors emitting light by the phosphor exciting means
under the vacuum atmosphere;
b: carrying the first and the second substrates into a bake processing chamber
in the vacuum atmosphere under the vacuum atmosphere and subjecting to bake processing
both the substrates at predetermined temperature;
c: carrying one or both of the first and the second substrates into a first getter
processing chamber in the vacuum atmosphere under the vacuum atmosphere, and first
getter processing the carried one substrate or one or both of the carried substrates;
d: carrying one or both of the first and the second substrates into an electron
beam clean processing chamber in the vacuum atmosphere under the vacuum atmosphere,
and electron beam clean processing the carried one substrate or one or both of
the carried substrates;
e: carrying one or both of the first and the second substrates into a second
getter
processing chamber in the vacuum atmosphere under the vacuum atmosphere, and second
getter processing the carried one substrate or one or both of the carried substrates; and
f: carrying the first and the second substrates into a seal processing chamber
in the vacuum atmosphere under the vacuum atmosphere, and heat sealing the substrates
in an opposing state.
Fifthly, the present invention is an apparatus for manufacturing an image
displaying apparatus, which is characterized by comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first vacuum chamber in which one or both of the first and the second substrates
can be carried under the vacuum atmosphere by the conveying means;
c: getter giving means arranged in the first vacuum chamber having a getter precursor
and getter activating means for activating the getter precursor;
d: a second vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
e: substrate arranging means, arranged in the second vacuum chamber toward inside,
for arranging the first and the second substrates in positions opposite to each
other by orienting the first and the second members for an image displaying apparatus
toward inside; and
f: sealing means, arranged in the second vacuum chamber, for heat sealing the
first and the second substrates arranged in opposing positions by the substrate
arranging means at predetermined temperature.
Sixthly, the present invention is an apparatus for manufacturing an image
displaying apparatus, which is characterized by comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
c: baking means, arranged in the first vacuum chamber, for bake processing the
carried first and the second substrates by heating the first and second substrates;
d: a second vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
e: substrate arranging means, arranged in the second vacuum chamber, for arranging
the first and the second substrates in positions opposite to each other by orienting
the first and the second members for an image displaying apparatus toward inside; and
f: sealing means, arranged in the second vacuum chamber, for heat sealing the
first and the second substrates arranged in opposing positions by the substrate
arranging means at predetermined temperature.
Seventhly, the present invention is an apparatus for manufacturing an
image displaying apparatus, which is characterized by comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
c: baking means, arranged in the first vacuum chamber, for bake processing the
carried first and the second substrates by heating the first and second substrates;
d: a second vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
e: getter giving means arranged in the second vacuum chamber having a getter
precursor
and getter activating means for activating the getter precursor;
f: a third vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
g: substrate arranging means, arranged in the third vacuum chamber, for arranging
the first and the second substrates in positions opposite to each other by orienting
the first and the second members for an image displaying apparatus toward inside; and
h: sealing means, arranged in the third vacuum chamber, for heat sealing the
first
and the second substrates arranged in opposing positions by the substrate arranging
means at predetermined temperature.
Eighthly, the present invention is an apparatus for manufacturing an image
displaying apparatus, which is characterized by comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
c: baking means, arranged in the first vacuum chamber, for bake processing the
carried first and the second substrates by heating the in first and second substrates;
d: a second vacuum chamber in which the first and the second substrates can be
carried under the vacuum atmosphere by the conveying means;
e: getter giving means arranged in the second vacuum chamber having a getter
precursor
and getter activating means for activating the getter precursor;
f: a third vacuum chamber in which one or both of the first and the second substrates
can be carried under the vacuum atmosphere by the conveying means;
g: electron beam cleaning means, arranged in the third vacuum chamber, for applying
electron beam clean processing by irradiating electron beams;
h: a fourth vacuum chamber in which one or both of the first and the second substrates
can be carried under the vacuum atmosphere by the conveying means;
i: second getter giving means arranged in the fourth vacuum chamber having a
getter
precursor and getter activating means for activating the getter precursor;
j: a fifth vacuum chamber in which one or both of the first and the second substrates
can be carried under the vacuum atmosphere by the conveying means;
k: substrate arranging means, arranged in the fifth vacuum chamber, for arranging
the first and the second substrates in positions opposite to each other by orienting
the first and the second members for an image displaying apparatus toward inside; and
l: sealing means, arranged in the fifth vacuum chamber, for heat sealing the
first
and the second substrates arranged in opposing positions by the substrate arranging
means at predetermined temperature.
Ninthly, the present invention is an apparatus for manufacturing an image
displaying apparatus, characterized by comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first decompression chamber in which the first substrate carried by the
conveying
means can be carried without being exposed to the atmosphere while maintaining
a decompressed state;
c: getter giving means arranged in the first decompression chamber having a getter
precursor and getter activating means for activating the getter precursor;
d: a second decompression chamber, to which getters are given, in which the first
and the second substrates can be carried without being exposed to the atmosphere;
e: substrate arranging means, arranged in the second decompression chamber, for
arranging the first and the second substrates in positions opposite to each other
by orienting the first and the second members for an image displaying apparatus
toward inside; and
f: sealing means, arranged in the second decompression chamber, for sealing the
first and the second substrates arranged in opposing positions by the substrate
arranging means by heating the first and the second substrates at predetermined temperature.
Tenthly, the present invention is an apparatus for manufacturing an image
displaying apparatus, characterized by comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first decompression chamber in which the first and the second substrates
carried in by the conveying means can be carried without being exposed to the atmosphere
while maintaining a decompressed state;
c: getter giving means arranged in the first decompression chamber having a getter
precursor and getter activating means for activating the getter precursor;
d: a second decompression chamber in which the first and the second substrates
in the first decompression chamber can be carried without being exposed to the atmosphere;
e: substrate arranging means, arranged in the second decompression chamber, for
arranging the first and the second substrates in positions opposite to each other
by orienting the first and the second members for an image displaying apparatus
toward inside; and
f: sealing means, arranged in the second decompression chamber, for sealing the
first and the second substrates arranged in opposing positions by the substrate
arranging means by the first and the second substrates at predetermined temperature.
Eleventh, the present invention is an apparatus for manufacturing an image
displaying apparatus, which is characterized by comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first decompression chamber in which the first and the second substrates
carried in by the conveying means can be carried without being exposed to the atmosphere
while maintaining a decompressed state;
c: baking means, arranged in the first decompression chamber, for bake processing
the carried first and the second substrates by heating the substrates;
d: first getter giving means, arranged in the first decompression chamber or a
second decompression chamber in which the first and the second substrates can be
carried from the first decompression chamber without being exposed to the atmosphere,
having a getter precursor and getter activating means for activating the getter precursor;
e: a third decompression chamber in which the first and the second substrates
can be carried from the first or the second decompression chamber without being
exposed to the atmosphere;
f: substrate arranging means, arranged in the third decompression chamber, for
arranging the first and the second substrates in positions opposite to each other
by orienting the first and the second members for an image displaying apparatus
toward inside; and
g: sealing means, arranged in the third decompression chamber, for sealing the
first and the second substrates arranged in opposing positions by the substrate
arranging means by heating the first and the second substrates at predetermined temperature.
Twelfth, the present invention is an apparatus for manufacturing an image
displaying apparatus, which is characterized by comprising:
a: a conveying means for conveying a first substrate provided with a first member
for an image displaying apparatus and a second substrate provided with a second
member for an image displaying apparatus;
b: a first decompression chamber in which the first and the second substrates
carried in by the conveying means can be carried without being exposed to the atmosphere
while maintaining a decompressed state;
c: baking means, arranged in the first decompression chamber, for bake processing
the carried first and the second substrates by heating the substrates;
d: first getter giving means, arranged in the first decompression chamber or a
second decompression chamber in which the first and the second substrates can be
carried from the first decompression chamber without being exposed to the atmosphere,
having a getter precursor and getter activating means for activating the getter precursor;
e: a third decompression chamber in which the first and the second substrates
can be carried from the first or the second decompression chamber without being
exposed to the atmosphere;
f: electron beam cleaning means, arranged in the third decompression chamber,
for cleaning the first and the second substrates by irradiating electron beams
to the first and the second substrates;
g: a fourth decompression chamber in which the first and the second substrates
can be carried from the third decompression chamber without being exposed to the atmosphere;
h: second getter giving means, arranged in the fourth decompression chamber,
having
a getter precursor and getter activating means for activating the getter precursor;
i: a fifth decompression chamber in which the first and the second substrates
can be carried from the fourth decompression chamber without being exposed to the atmosphere;
j: substrate arranging means, arranged in the fifth decompression chamber, for
arranging the first and the second substrates in positions opposite to each other
by orienting the first and the second members for an image displaying apparatus
toward inside; and
k: sealing means, arranged in the fifth decompression chamber, for sealing the
first and the second substrates arranged in opposing positions by the substrate
arranging means by heating the first and the second substrates at predetermined temperature.
In addition, the present invention includes the following features as its preferred aspects:
in the above-mentioned first and the second aspects, the steps a, b and c are
steps set on one line, and a heat shielding member formed of reflective metal or
the like is disposed between the getter processing chamber and the seal processing chamber;
in the above-mentioned first and the second aspects, the steps a, b and c are
steps set on one line, and a load lock is disposed between the getter processing
chamber and the seal processing chamber;
in the above-mentioned first and the second aspects, the steps a, b and c are
set on a star arrangement, and the getter processing chamber and the seal processing
chamber are partitioned by an independent chamber;
in the above-mentioned third aspect, the steps a, b, c and d are steps set on
one line, and a heat shielding material formed of reflective metal or the like
is disposed between the bake processing chamber and the getter processing chamber,
between the bake processing chamber and the seal processing chamber, or between
the bake processing chamber, the getter processing chamber and the seal processing
chamber, respectively;
in the above-mentioned third aspect, the steps a, b, c and d are steps set on
one line, and a load lock is disposed the bake processing chamber and the getter
processing chamber, between the bake processing chamber and the seal processing
chamber, or between the bake processing chamber, the getter processing chamber
and the seal processing chamber, respectively;
in the above-mentioned third aspect, the steps a, b, c and d are arranged on a
star arrangement, and the bake processing chamber, the getter processing chamber
and the seal processing chamber are partitioned by an independent chamber;
in the above-mentioned fourth aspect, the steps a, b, c, d, e and f are steps
set on one line, and a heat shielding member formed of reflective metal or the
like is disposed between the bake processing chamber and the first getter processing
chamber, between the first getter processing chamber and the electron beam clean
processing chamber, between the electron beam clean processing chamber, or between
the second getter processing chamber and the seal processing chamber;
in the above-mentioned fourth aspect, the steps a, b, c, d, e and f are steps
set on one line, and a load lock is disposed between the bake processing chamber
and the first getter processing chamber, between the first getter processing chamber
and the electron beam clean processing chamber, between the electron beam clean
processing chamber, or between the second getter processing chamber and the seal
processing chamber;
in the above-mentioned fourth aspect, the steps a, b, c, d, e and f are set on
a star arrangement, and the bake processing chamber, the first getter processing
chamber, the electron beam clean processing chamber, the second getter processing
chamber and the seal processing chamber are partitioned by independent chambers;
in the above-mentioned fifth and the sixth aspects, the first vacuum chamber
and
the second vacuum chamber are arranged on one line;
in the above-mentioned fifth and the sixth aspects, the first vacuum chamber
and
the second vacuum chamber are arranged on one line, and each chamber is partitioned
by a heat shielding member formed of reflective metal;
in the above-mentioned seventh aspect, the first vacuum chamber, the second vacuum
chamber and the third vacuum chamber are arranged on one line, and each chamber
is partitioned by a heat shielding member formed of reflective metal or the like;
in the above-mentioned seventh aspect, the first vacuum chamber, the second vacuum
chamber and the third vacuum chamber are arranged on one line, and each chamber
is partitioned by a load lock;
in the above-mentioned seventh aspect, the first vacuum chamber, the second vacuum
chamber and the third vacuum chamber are provided on a star arrangement, and each
chamber is partitioned by an independent chamber;
in the above-mentioned eighth aspect, the first vacuum chamber, the second vacuum
chamber, the third vacuum chamber, the fourth vacuum chamber and the
