Senior Fitness - Exercise and Nutrition for Aging Men and Women
FREE Article Feed for your website.
Home Ownership Magazine
Party Planning Information
Article Marketing Resources
Bio-Medical Research Article Database
Informative Articles on Life, Love and Happiness
Tutorials on Business to Writing
Famous Quotes from Famous People
Song Lyric Information
New US Patent Information
Comprehensive List of Content by Category
Online Auctions and Shopping Related Articles
Article Search
Most Recent Articles
Title: Intermittent stress augmentation pacing for cardioprotective effect
Patent Number: 7,437,191 Issued on 10/14/2008 to Pastore,   et al.

Title: Drum lid for minimal liquid carryover in a vacuum system
Patent Number: 6,767,380 Issued on 07/27/2004 to von Stackelberg, Jr.

Title: Method and apparatus for chemical mechanical planarization
Patent Number: 6,767,428 Issued on 07/27/2004 to Gotkis,   et al.

Title: Electronic device including a self-assembled monolayer, and a method of fabricating the same
Patent Number: 7,132,678 Issued on 11/07/2006 to Kagan,   et al.

Title: Oblique angled suspension caster fork for wheelchairs
Patent Number: 6,892,421 Issued on 05/17/2005 to Cooper,   et al.

Title: Methods and systems for implementing a profitability model
Patent Number: 7,124,104 Issued on 10/17/2006 to Casciano,   et al.

Title: Process for the preparation of aryl-pyridinyl compounds
Patent Number: 6,765,097 Issued on 07/20/2004 to Giordano,   et al.

Title: Removable mother/daughter peripheral card
Patent Number: 6,893,268 Issued on 05/17/2005 to Harari,   et al.

Title: Feed conveyor/rock trap and header drive for an agricultural combine
Patent Number: 6,705,067 Issued on 03/16/2004 to Schroeder,   et al.

Title: Computer-generated hologram and its fabrication process, reflector using a computer-generated hologram, and reflective liquid crystal display
Patent Number: 7,054,044 Issued on 05/30/2006 to Hamano,   et al.

Title: Station identification for a local area augmentation system on a visual display
Patent Number: 6,950,036 Issued on 09/27/2005 to Snodgrass,   et al.

Title: Phenol resin forming material for pulley used in motor vehicles and phenol resin pulley for motor vehicles
Patent Number: 6,765,051 Issued on 07/20/2004 to Yazawa,   et al.

Title: Method and apparatus for dithering or undithering data words in a data stream
Patent Number: 7,054,037 Issued on 05/30/2006 to Mevissen

Title: Methods and apparatus for controlling a motor/generator
Patent Number: 7,116,073 Issued on 10/03/2006 to Sorkin

Title: Unified control of vehicle dynamics using force and moment control
Patent Number: 6,892,123 Issued on 05/10/2005 to Hac

Title: Polygon mirror and optical scanning device having the same
Patent Number: 7,054,047 Issued on 05/30/2006 to Tamaru

Title: Copy protection apparatus and method
Patent Number: 6,865,553 Issued on 03/08/2005 to Morito,   et al.

Title: Stacked polysilicon layer for boron penetration inhibition
Patent Number: 6,762,454 Issued on 07/13/2004 to Ibok,   et al.

Title: Optical sub-assembly module for suppressing optical back-reflection and effectively guiding light from light source to optical waveguide
Patent Number: 6,945,710 Issued on 09/20/2005 to Chen,   et al.

Title: Low-contaminative hose and rubber composition for use in making the same
Patent Number: 6,737,480 Issued on 05/18/2004 to Ikeda,   et al.

Title: Cup lid having combined straw slot depression and tear back lid retainer
Patent Number: 6,948,633 Issued on 09/27/2005 to Freek,   et al.

Title: High-accuracy capacitor digital-to-analog converter
Patent Number: 7,123,072 Issued on 10/17/2006 to Bu,   et al.

Title: Apparatus for adaptively adjusting a data receiver
Patent Number: 7,123,046 Issued on 10/17/2006 to Keeth

Title: Method of making multilevel MEMS structures
Patent Number: 6,861,363 Issued on 03/01/2005 to Harchanko,   et al.

Title: Marine vessel monitoring system
Patent Number: 6,816,088 Issued on 11/09/2004 to Knoska,   et al.

Title: Router bit system
Patent Number: 7,140,817 Issued on 11/28/2006 to Phillips,   et al.

Title: Concrete stamping apparatus
Patent Number: 7,140,804 Issued on 11/28/2006 to Gregg

Title: Imaging apparatus having a carrier support and drive arrangement
Patent Number: 7,140,793 Issued on 11/28/2006 to Cook

Title: Joint structure for power transmitting member and method for producing the same
Patent Number: 7,140,800 Issued on 11/28/2006 to Sugiyama,   et al.

Title: Casing arrangement
Patent Number: 7,140,836 Issued on 11/28/2006 to Balsdon

Title: Rotary-die-method and fill wedge for producing capsules, in particular soft capsules
Patent Number: 6,935,090 Issued on 08/30/2005 to Stolz

Title: Restraint coupling
Patent Number: 6,962,394 Issued on 11/08/2005 to Anthony,   et al.

Title: Split and merge design flow concept for fast turnaround time of circuit layout design
Patent Number: 6,898,770 Issued on 05/24/2005 to Boluki,   et al.

Title: Corner cooled turbine nozzle
Patent Number: 7,140,835 Issued on 11/28/2006 to Lee,   et al.

Title: Attachment for forming shapes following excavation
Patent Number: 7,140,831 Issued on 11/28/2006 to Wollgast,   et al.

Title: Optical disc drive and optical disc discriminating method
Patent Number: 6,956,801 Issued on 10/18/2005 to Horimoto

Title: Method of drilling lateral wellbores from a slant well without utilizing a whipstock
Patent Number: 6,964,308 Issued on 11/15/2005 to Zupanick

Title: Capacitor for semiconductor device, manufacturing method thereof, and electronic device employing the same
Patent Number: 7,105,401 Issued on 09/12/2006 to Lee,   et al.

Title: Flexure mechanism for interface device
Patent Number: 7,193,607 Issued on 03/20/2007 to Moore,   et al.

Title: Aggregate dryer burner with compressed air oil atomizer
Patent Number: 6,969,249 Issued on 11/29/2005 to Marino,   et al.

Title: Manufacturing method of semiconductor device
Patent Number: 7,105,400 Issued on 09/12/2006 to Imai,   et al.

Title: Semiconductor constructions, and methods of forming semiconductor constructions
Patent Number: 7,105,402 Issued on 09/12/2006 to McQueen,   et al.

Title: Shaped anchor
Patent Number: 7,140,826 Issued on 11/28/2006 to Powers,   et al.

Title: Roadway for decelerating and/or accelerating a vehicle including an aircraft
Patent Number: 6,969,213 Issued on 11/29/2005 to Rastegar,   et al.

Title: Ignition system for internal combustion engine and ignition method of fuel charged in a fuel chamber
Patent Number: 6,796,299 Issued on 09/28/2004 to Isono

Title: Dual seat valve
Patent Number: 6,796,323 Issued on 09/28/2004 to Taylor

Title: Damper system with sealing plug
Patent Number: 6,796,328 Issued on 09/28/2004 to Myles

Title: Multiple person high altitude recycling breathing apparatus
Patent Number: 6,796,307 Issued on 09/28/2004 to Hughson,   et al.

Title: Backup power system
Patent Number: 7,042,108 Issued on 05/09/2006 to Farkas

Title: Methods of cleaning vaporization surfaces
Patent Number: 6,796,313 Issued on 09/28/2004 to Marsh

Title: System and method for searching for duplicate data
Patent Number: 6,795,903 Issued on 09/21/2004 to Schultz,   et al.

Title: Shared memory interface with conventional access and synchronization support
Patent Number: 6,795,901 Issued on 09/21/2004 to Florek,   et al.

Title: Line control arrangement for continuously variable valve timing system
Patent Number: 6,796,276 Issued on 09/28/2004 to Kim

Title: Method and apparatus for determining a match address in an intra-row configurable cam device
Patent Number: 6,795,892 Issued on 09/21/2004 to Pereira,   et al.

Title: Mixture fitting for a combustible gas burner system
Patent Number: 6,796,302 Issued on 09/28/2004 to Butler,   et al.

Title: Ironing board ajdustable in height
Patent Number: 6,796,059 Issued on 09/28/2004 to Denisart,   et al.

Title: Selective memory controller access path for directory caching
Patent Number: 6,795,897 Issued on 09/21/2004 to Benveniste,   et al.

Title: Method for restarting an apparatus if the integrity of data in a memory is lost during micro-outage of power supply
Patent Number: 6,795,913 Issued on 09/21/2004 to Ricordel

Title: Duct repairing material, repairing structure, and repairing method
Patent Number: 6,796,334 Issued on 09/28/2004 to Ishikawa,   et al.

Title: Optical viewer instrument with photographing function
Patent Number: 6,914,636 Issued on 07/05/2005 to Hirunuma,   et al.

Title: Internal combustion engine with valve train
Patent Number: 6,796,281 Issued on 09/28/2004 to Shimoyama,   et al.

Title: Method for diagnosing a network
Patent Number: 6,795,941 Issued on 09/21/2004 to Nickels

Title: Priority coloring for VLSI designs
Patent Number: 6,795,961 Issued on 09/21/2004 to Liebmann,   et al.

Title: Methods and apparatus for ManArray PE-PE switch control
Patent Number: 6,795,909 Issued on 09/21/2004 to Barry,   et al.

Title: Prevention of power state change in response to chassis intrusion when computer system is not in powered up power state
Patent Number: 6,795,926 Issued on 09/21/2004 to Matula,   et al.

Title: Ignition spark enhancing device
Patent Number: 6,796,298 Issued on 09/28/2004 to Kiker

Title: Intake pressure sensor arrangement for engine
Patent Number: 6,796,291 Issued on 09/28/2004 to Suzuki,   et al.

Title: Single revolution cam engine
Patent Number: 6,796,284 Issued on 09/28/2004 to Von Wielligh

Title: Multiple traps after faulty access to a resource
Patent Number: 6,795,937 Issued on 09/21/2004 to Harris,   et al.

Title: Method and system for setting optical drive write strategies
Patent Number: 6,915,374 Issued on 07/05/2005 to Pereira

Title: Pulmonary aerosol delivery device and method
Patent Number: 6,796,303 Issued on 09/28/2004 to Zimlich, Jr.,   et al.

Title: Vertical internal combustion engine
Patent Number: 6,796,282 Issued on 09/28/2004 to Tsubouchi,   et al.

Title: Inductor and method for producing the same
Patent Number: 6,909,350 Issued on 06/21/2005 to Uriu,   et al.

Title: Diaphragm system
Patent Number: 6,796,336 Issued on 09/28/2004 to Ijspeert

Title: Protective packing structure for a cylindrical object and fitted with a fastener
Patent Number: 6,796,333 Issued on 09/28/2004 to Birkel,   et al.

Method for forming color filter Number:7,410,822 from the United States Patent and Trademark Office (PTO) owispatent

Home    Author Login    Submit Article    Article Search    Add Your Link    Edit Your Link    Contact Us    Advertising    Disclaimer

   

 
Web LinkGrinder.com

Top Breaking News
     Greek, Cypriot Leaders Resume Unification Talks in Nicosia by Nathan Morley
     Indonesia Tobacco Sales Grow, Raising Health Fears
     South Korea Allows Top Defector to Travel Overseas by VOA News

Title: Method for forming color filter

Abstract: A method for forming a color filter is provided. The method comprises steps of providing a substrate having a passivasion layer formed thereon. The substrate has at least one complementary metal-oxide semiconductor formed therein and the passivasion layer has at least trench formed therein in a peripheral region of the substrate. At least two adjacent color filter blocks are sequentially formed over the passivasion layer and the color filter blocks comprises a first color filter block and a second color filter block. The first color filter block and the second color filter block are disposed within a display region of the substrate. Moreover, the material for forming the first color filter, which is formed prior to the formation of the second color filter block, further fills the trench in the peripheral region simultaneously with a formation of the first color filter block.

Patent Number: 7,410,822 Issued on 08/12/2008 to Wu


Inventors: Wu; Hsin-Ping (Yilan County, TW)
Assignee: United Microelectronics Corp. (Hsinchu, TW)
Appl. No.: 11/458,695
Filed: July 20, 2006


Current U.S. Class: 438/57 ; 438/70
Current International Class: H01L 21/00 (20060101)
Field of Search: 438/57,69,70,200


References Cited [Referenced By]

U.S. Patent Documents
2002/0197763 December 2002 Yeh et al.
2007/0010042 January 2007 Li
2007/0125935 June 2007 Yaung
Primary Examiner: Nguyen; Tuan H
Attorney, Agent or Firm: Jianq Chyun IP Office

Claims



What is claimed is:

1. A method of forming a color filter over a substrate having a display region and a peripheral region surrounding the display region, wherein the substrate has a passivasion layer formed thereon and the passivasion layer has at least one trench formed therein within the peripheral region, the method comprising: forming a first color filter layer over the passivasion layer to fill the trench; patterning the first color filter layer so as to form a plurality of first color filter blocks in the display region and to expose a portion of the passivasion layer; forming a second color filter layer over the passivasion layer; patterning the second color filter layer to form a plurality of second color filter blocks between the first color filter blocks respectively; forming a third color filter layer over the passivasion layer; and patterning the third color filter layer to form a plurality of third color filter blocks between the first color filter blocks and the second color filter blocks respectively.

2. The method of claim 1, wherein the trench is a die seal ring enclosing the display region.

3. The method of claim 1, wherein the trench is an opening exposing a metal pad formed under the passivasion layer.

4. The method of claim 3, wherein the metal pad is electrically connected to a complementary metal-oxide semiconductor formed in the substrate.

5. The method of claim 1 further comprising a step of selectively removing the first color filter layer in the trench after the third color filter blocks are formed.

6. The method of claim 1, wherein the method for forming the first color filter layer includes a spin-on coating process with a first spin rate and the method for forming the second color filter layer includes the spin-on coating process with a second spin rate.

7. The method of claim 6, wherein the first spin rate is smaller than the second spin rate.

8. The method of claim 6, wherein the method for forming the third color filter layer includes the spin-on coating process with a third spin rate and the third spin rate is larger than the second spin rate.

9. A method for forming a color filter, comprising: providing a substrate having a passivasion layer formed thereon, wherein the substrate has at least one complementary metal-oxide semiconductor formed therein and the passivasion layer has at least trench formed therein in a peripheral region of the substrate; and forming at least two adjacent color filter blocks including a first color filter block and a second color filter block sequentially over the passivasion layer, wherein the first color filter block and the second color filter block are disposed within a display region of the substrate and the material for forming the first color filter, which is formed prior to the formation of the second color filter block, further fills the trench in the peripheral region simultaneously with a formation of the first color filter block.

10. The method of claim 9, wherein the display region of the substrate is enclosed by the peripheral region of the substrate.

11. The method of claim 9, wherein the trench is a die seal ring enclosing the display region.

12. The method of claim 9, wherein the trench is an opening exposing a metal pad formed under the passivasion layer.

13. The method of claim 12, wherein the metal pad is electrically connected to the complementary metal-oxide semiconductor formed in the substrate.

14. The method of claim 9 further comprising a step of selectively removing the material of the first color filter block in the trench after the second color filter block is formed.

15. The method of claim 9, wherein the method for forming the first color filter block comprises performing a spin-on coating process with a first spin rate and the method for forming the second color filter block comprising performing the spin-on coating process with a second spin rate.

16. The method of claim 15, wherein the first spin rate is smaller than the second spin rate.
Description



BACKGROUND OF THE INVENTION

1. Field of Invention

The present invention relates to a method for forming a semiconductor device. More particularly, the present invention relates to a method for forming a color filter.

2. Description of Related Art

Recently, various displays comprising Liquid Crystal Display (LCD), Field Emission Display (FED), Organic Light Emitting Diode (OLED), and Plasma Display Panel (PDP) have come to be widely used in daily life, such as those applied in TVs, computers, projectors, mobile phones, and personal audio-visual fittings.

The difference among different types of displays lies in the imaging manner. One of them utilizes a light source, several optical elements composed of prism groups, and multiple panels corresponding to each beam. The principle thereof is that the light source (white light) is filtered into three primary color beams, R, G, B, with the prism groups, and then modulated with three panels to make the image signals carried in the three beams. Finally, the images can be synthesized by optical elements, such as, dichroic prisms and lenses. However, the three panels comprise a micro-display.

The micro-display can be applied in various kinds of displays, such as, LCD or OLED. However, besides the display region for forming the color filter thereon, the substrate further comprises the peripheral region having trenches serving as die seal ring or openings for exposing the metal pad underneath. Hence, during the different color filter layers are formed over the substrate to form the color filter array, the step high of the trench would lead to the striation effect of the color filter layers. The striation of the color filter layers extends from the trenches within the peripheral region of the substrate into the display region of the substrate. Therefore, the display performance is degraded.

SUMMARY OF THE INVENTION

Accordingly, at least one objective of the present invention is to provide a method for forming a color filter capable of preventing a display region from being damaged by the striation effect.

At least another objective of the present invention is to provide a method for forming a color filter capable of increasing the performance of the display.

To achieve these and other advantages and in accordance with the purpose of the invention, as embodied and broadly described herein, the invention provides a method of forming a color filter over a substrate having a display region and a peripheral region surrounding the display region. The substrate has a passivasion layer formed thereon and the passivasion layer has at least one trench formed therein within the peripheral region. The method comprises steps of forming a first color filter layer over the passivasion layer to fill the trench and then patterning the first color filter layer so as to form a plurality of first color filter blocks in the display region and to expose a portion of the passivasion layer. A second color filter layer is formed over the passivasion layer and the second color filter layer is patterned to form a plurality of second color filter blocks between the first color filter blocks respectively. A third color filter layer is formed over the passivasion layer and the third color filter layer is patterned to form a plurality of third color filter blocks between the first color filter blocks and the second color filter blocks respectively.

According to one embodiment of the present invention, the trench is a die seal ring enclosing the display region.

According to one embodiment of the present invention, the trench is an opening exposing a metal pad formed under the passivasion layer. The metal pad is electrically connected to a complementary metal-oxide semiconductor formed in the substrate.

According to one embodiment of the present invention, the method further comprises a step of selectively removing the first color filter layer in the trench after the third color filter blocks are formed.

According to one embodiment of the present invention, the method for forming the first color filter layer includes a spin-on coating process with a first spin rate and the method for forming the second color filter layer includes the spin-on coating process with a second spin rate. The first spin rate is smaller than the second spin rate. The method for forming the third color filter layer includes the spin-on coating process with a third spin rate and the third spin rate is larger than the second spin rate.

The present invention also provides a method for forming a color filter. The method comprises steps of providing a substrate having a passivasion layer formed thereon. The substrate has at least one complementary metal-oxide semiconductor formed therein and the passivasion layer has at least trench formed therein in a peripheral region of the substrate. At least two adjacent color filter blocks are sequentially formed over the passivasion layer and the color filter blocks comprises a first color filter block and a second color filter block. The first color filter block and the second color filter block are disposed within a display region of the substrate. Moreover, the material for forming the first color filter, which is formed prior to the formation of the second color filter block, further fills the trench in the peripheral region simultaneously with a formation of the first color filter block.

According to one embodiment of the present invention, the display region of the substrate is enclosed by the peripheral region of the substrate.

According to one embodiment of the present invention, the trench is a die seal ring enclosing the display region.

According to one embodiment of the present invention, the trench is an opening exposing a metal pad formed under the passivasion layer. The metal pad is electrically connected to the complementary metal-oxide semiconductor formed in the substrate.

According to one embodiment of the present invention, the method comprises a step of selectively removing the material of the first color filter block in the trench after the second color filter block is formed.

According to one embodiment of the present invention, the method for forming the first color filter block comprises performing a spin-on coating process with a first spin rate and the method for forming the second color filter block comprising performing the spin-on coating process with a second spin rate. The first spin rate is smaller than the second spin rate.

In the present invention, the first color filter layer (first color filter block) is formed to fill in the trench in the passivasion layer prior to the formation of the second color filter layer (second color filter block) so that the striation, which is extending from the trench into the display region and caused by the step high of the trench, of the subsequent formed color filter layers can be effectively prevented. Furthermore, for the trench exposing the metal pad under the passivasion layer, filling the first formed color filter into the trench can prevent the metal pad from being damaged by the developer during the formation of the other color filter blocks.

In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, a preferred embodiment accompanied with figures is described in detail below.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A through 1D are cross-sectional views showing a method for forming a color filter according to one embodiment of the present invention.

FIG. 2 is a cross-sectional view showing another exemplar of a trench in a peripheral region of a substrate shown in FIG. 1A.

DESCRIPTION OF EMBODIMENTS

FIGS. 1A through 1D are cross-sectional views showing a method for forming a color filter according to one embodiment of the present invention. As shown in FIG. 1A, a substrate 100 having a display region 100a and a peripheral region 100b is provided. The substrate 100 has a passivasion layer 104 formed thereon. The passivation layer 104 has at least one trench 104a formed therein within the peripheral region 100b of the substrate 100. The trench 104a can be, for example, an opening exposing a metal pad 102 formed under the passivasion layer 104. As shown in FIG. 2, the trench 104a can also be, for example, a die seal ring 104b enclosing the display region 100a. Furthermore, the metal pad 102 can be, for example, electrically connected to a complementary metal-oxide semiconductor (CMOS) formed in the substrate 100 for controlling the display formed in the display region 100a.

As shown in FIG. 1A, a first color filter layer 106 is formed over the substrate 100 and the material 106a of the first color filter layer 106 in the peripheral region 100b of the substrate 100 fills into the trench 104a. The method for forming the first color filter layer 106 includes a spin-on coating process with a first spin rate.

As shown in FIG. 1B, the first color filter layer 106 is patterned into several first color filter blocks 106b in the display region 100a of the substrate 100 and the material 106a of the first color filter layer 106 still remains in the trench 104a within the peripheral region 100b of the substrate 100. The method for patterning the first color filter layer 106 comprises steps of exposing the first color filter layer 106 by a mask so as to transfer a color filter block pattern form the mask onto the first color filter layer 106 and then performing a developing process to remove the un-exposure portion of the first color filter layer 106 to form the first color filter blocks 106b.

Then, a second color filter layer 108 is formed over the substrate 100. The method for forming the second color filter layer 108 includes the spin-on coating process with a second spin rate. The second spin rate is larger than the first spin rate in order to evenly fill the second color filter layer 108 into the gaps between the first color filter blocks 106b. Furthermore, the thickness of the first color filter layer 106 is larger than the thickness of the second color filter layer 108 so that the second color filter layer 108 can be easily filled into the gaps between the first color filter blocks 106b.

As shown in FIG. 1C, the second color filter layer 108 is patterned to form several second color filter blocks 108a between the first color filter blocks 106b respectively in the display region 100a of the substrate 100. The method for patterning the second color filter layer 108 is as same as the method for patterning the first color filter layer 106 mentioned above and is not detail described herein. Thereafter, a third color filter layer 110 is formed over the substrate 100. The method for forming the third color filter layer 110 includes the spin-on coating process with a third spin rate. The third spin rate is larger than the second spin rate in order to evenly fill the third color filter layer 110 in the spaces between the first color filter blocks 106b and the second color filter blocks 108a. Moreover, the thickness of the third color filter layer 110 is smaller than the thickness of the second color filter layer 108 so that the third color filter layer 110 can be easily filled into the spaces between the first color filter blocks 106b and the second color filter blocks 108a.

As shown in FIG. 1D, the third color filter layer 110 is patterned to form several third color filter blocks 110a between the first color filter blocks 106b and the second color filter blocks 108a respectively in the display region 100a of the substrate 100. The method for patterning the third color filter layer 110 is as same as the method for patterning the first color filter layer 106 mentioned above and is not detail described herein. Therefore, the first color filter blocks 106b, the second color filter blocks 108a and the third color filter blocks 110a together form a color filter 112. It should be noticed that the colors of the first color filter layer 106 (the first color filter blocks 106b), the second color filter layer 108 (the second color filter blocks 108a) and the third color filter layer 110 (the third color filter blocks 110a) are different from each other. After the third color filter blocks 110a are formed, the material 106a (shown in FIG. 1A) in the trench 104 is selectively removed according to the requirement of the circuit design. That is, the material 106a can be removed to expose the metal pad 102 underneath so that the metal pad 102 can be electrically connected to the external object, such as lead frame, through the later performed bonding process.

In this embodiment, the color filter 112 formed in the display region 100a of the substrate 100 is comprised of at least three different color filter blocks. However, in the practice, the color filter in the display region can be composed of at least two different color filter blocks. On the other words, as long as the color filter layer, with is first formed over the substrate, fills the trenches in the passivasion layer in the peripheral region of the substrate, the later formed color filter can be free from the striation phenomenon caused by the step high of the trenches.

In the present invention, the first formed color filter layer fills into the trenches in the peripheral region of the substrate so that the striation effect caused by the step high of the trenches can be effectively improved. Furthermore, for the trench serving as an opening exposing the metal pad underneath, the first formed color filter layer filling into the trench can prevent the metal pad from being damaged by the developer during the step of patterning the color filter layers.

The present invention has been disclosed above in the preferred embodiments, but is not limited to those. It is known to persons skilled in the art that some modifications and innovations may be made without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be defined by the following claims.

*


Free Web Sudoku Puzzles.
Solve with your browser.
2       4     5  
  5   3          
  8     9   2    
6         1   4 2
    2       6    
1 9   7         3
    9   1     2  
          6   1  
  4     7       8
What is it?



Add Your Site · Terms Of Service · Privacy Policy


DISCLAIMER
Linkgrinder is a free service that searches the Internet and indexes all files found so that you may search quickly and easily for shared files. These files are created and made available individually by users whose identity we are not aware of and who we have no control over. In essence we function like a search engine tool; these files ARE NOT STORED OR SERVED BY OUR NETWORK. We are not responsible for any materials obtained by using our service. We do not monitor any of the contents of these files. These files may contain viruses, illegal materials, materials inappropriate for minors, offensive files and the like. BY USING OUR SERVICE, YOU ASSUME FULL RESPONSIBILITY FOR DOWNLOADING THESE MATERIALS AND WILL INDEMNIFY US FOR ANY DAMAGES THAT MAY BE INCURRED.

For More Specific Information VIEW OUR TERMS OF SERVICE.

Thank you and Enjoy!