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SEM test apparatus Number:7,436,177 from the United States Patent and Trademark Office (PTO) owispatent

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Title: SEM test apparatus

Abstract: Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.

Patent Number: 7,436,177 Issued on 10/14/2008 to Gorrell,   et al.

Inventors: Gorrell; Jonathan (Gainesville, FL), Davidson; Mark (Florahome, FL), Tokarz; Jean (Hawthorne, FL)
Assignee: Virgin Islands Microsystems, Inc. (Saint Thomas, VI)
Appl. No.: 11/418,081
Filed: May 5, 2006

Current U.S. Class: 324/317 ; 315/39.51; 315/39.77; 324/309
Current International Class: H01J 25/50 (20060101)
Field of Search: 324/317,309 315/39.51,39.77

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Primary Examiner: Nguyen; Kiet T
Attorney, Agent or Firm: Davidson Berquist Jackson & Gowdey LLP
Claims


We claim:

1. A test apparatus for examining the operation of ultra-small resonant structures comprising: an array of ultra-small resonant structures formed on a substrate; a SEM including a source of a beam of charged particles; a multi-positional stage mountable within the SEM and on which the array is mounted, the stage being movable in multiple directions relative to a path of a beam of charged particles produced by the source so that the array can be oriented relative to the beam and be excited thereby.

2. The test apparatus as in claim 1 wherein the positioning of the stage is controlled to position the array relative to the beam further comprises a source of control inputs.

3. The test apparatus as in claim 1 further including at least one detector for receiving energy produced by the array when excited by the beam and at least one display operatively connected to the detector for displaying the energy produced by the array.

4. The test apparatus as in claim 3 wherein the detector includes an optical pick-up assembly.

5. The test apparatus as in claim 3 wherein the detector comprises a focal plane array.

6. The test apparatus as in claim 1 further including a beam deflector to move the beam relative to the array.

7. The test apparatus as in claim 1 wherein the stage is movable prior to and during the generation of the beam.

8. The test apparatus as in claim 1 wherein the beam is movable relative to the array.

9. The test apparatus as in claim 1 wherein multiple arrays are provided on the substrate and the beam is oriented to excite the multiple arrays.

10. The test apparatus as in claim 1 wherein the substrate comprises a chip.

11. The test apparatus as in claim 1 wherein the SEM comprises a scanning electron microscope.

12. The test apparatus as in claim 1 wherein the SEM comprises a field emission scanning electron microscope.
Description


COPYRIGHT NOTICE

A portion of the disclosure of this patent document contains material which is subject to copyright or mask work protection. The copyright or mask work owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent file or records, but otherwise reserves all copyright or mask work rights whatsoever.

CROSS-REFERENCE TO CO-PENDING APPLICATIONS

The present invention is related to the following co-pending U.S. patent applications: (1) U.S. patent application Ser. No. 11/238,991, filed Sep. 30, 2005, entitled "Ultra-Small Resonating Charged Particle Beam Modulator"; (2) U.S. patent application Ser. No. 10/917,511, filed on Aug. 13, 2004, entitled "Patterning Thin Metal Film by Dry Reactive Ion Etching"; (3) U.S. application Ser. No. 11/203,407, filed on Aug. 15, 2005, entitled "Method Of Patterning Ultra-Small Structures"; (4) U.S. application Ser. No. 11/243,476, filed on Oct. 5, 2005, entitled "Structures And Methods For Coupling Energy From An Electromagnetic Wave"; (5) U.S. application Ser. No. 11/243,477, filed on Oct. 5, 2005, entitled "Electron beam induced Resonance"; (6) U.S. application Ser. No. 11/325,432, entitled "Resonant Structure-Based Display," filed on Jan. 5, 2006; (7) U.S. application Ser. No. 11/325,571, entitled "Switching Micro-Resonant Structures By Modulating A Beam Of Charged Particles," filed on Jan. 5, 2006; (8) U.S. application Ser. No. 11/325,534, entitled "Switching Micro-Resonant Structures Using At Least One Director," filed on Jan. 5, 2006; (9) U.S. application Ser. No. 11/350,812, entitled "Conductive Polymers for the Electroplating", filed on Feb. 10, 2006; (10) U.S. application Ser. No. 11/302,471, entitled "Coupled Nano-Resonating Energy Emitting Structures," filed on Dec. 14, 2005; and (11) U.S. application Ser. No. 11/325,448, entitled "Selectable Frequency Light Emitter", filed on Jan. 5, 2006, which are all commonly owned with the present application, the entire contents of each of which are incorporated herein by reference.

FIELD OF THE DISCLOSURE

This disclosure relates to the use and testing of ultra-small resonant structures, and arrays formed there from, together with the formation of associated structures located adjacent such ultra-small resonant structures, and specifically an approach for checking the operation of ultra-small resonant structures as they are excited by beams of charged particles directed there past within, for example, a high resolution, scanning electron microscope, a high resolution, field emission scanning electron microscope (FE-SEM) or an environmental scanning electron microscope (ESEM) (collectively referred to herein as an "SEM"), and light or other electromagnetic radiation (EMR) produced by the excited ultra-small resonant structures.

INTRODUCTION

Ultra-small structures encompass a range of structure sizes sometimes described as micro- or nano-sized. Objects with dimensions measured in ones, tens or hundreds of microns are described as micro-sized. Objects with dimensions measured in ones, tens or hundreds of nanometers or less are commonly designated nano-sized. Ultra-small hereinafter refers to structures and features ranging in size from hundreds of microns in size to ones of


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